Publications – Silicon micromachining: CIBA Process

2015

H. D. Liang, S. K. Vanga, J. F. Wu, B. Q. Xiong, C. Y. Yang, A. A. Bettiol, and M. B. H. Breese, Fabrication of 3D photonic components on bulk crystalline silicon Optics Express 23 (2015) 121-129
Z. Y. Dang and M. B. H. Breese, Depth-Resolved Imaging of Radiation-Induced Doping Changes in Silicon, ECS Journal of Solid State Science and Technology, 4 (12) P462-P467 (2015)

2014

Z. Y. Dang, M. B. H. Breese, Y. Lin, E. S. Tok, and E. Vittone, Enhanced electrochemical etching of ion irradiated silicon by localized amorphization, Applied Physics Letters 104, 192108 (2014)
Sara Azimi, Zhiya Dang, Ce Zhang, Jiao Song, Mark B. H. Breese, Chorng Haur Sow, Jeroen A. van Kan and Johan R. C. van der Maarel, Buried centimeter-long micro- and nanochannel arrays in porous silicon and glass, Lab Chip, 2014, 14, 2081
J Song, S Azimi, Z Y Dang and M B H Breese, Integration of nano-scale components and supports in micromachined 3D silicon structures, J. Micromech. Microeng. 24 (2014) 045008
S. Azimi, Z. Y. Dang, K. Ansari and M. B. H. Breese, Fabrication of silicon molds with multi-level, non-planar, micro- and nano-scale features, Nanotechnology 25, 375301 (2014)
S. Azimi, Z. Y. Dang and M. B. H. Breese, Oxidation smoothening of silicon machined micro- and nano-scale structures, Microelectronic Engineering 121, 156-161 (2014)
S. Azimi, J. Song, C. J. Li, S. Mathew, M. B. H. Breese and T. Venkatesan, Nanoscale lithography of LaAlO3/SrTiO3 wires using silicon stencil masks, Nanotechnology 25, 445301 (2014)
Z. Y. Dang, D. Q. Liu, S. Azimi and M. B. H. Breese, A study of buried channel formation in oxidized porous silicon, RSC Advances, 2014, 4, 57402

2013

Z.Y. Dang, J. Song, S. Azimi, M.B.H. Breese, J. Forneris, E. Vittone, On the formation of silicon wires produced by high-energy ion irradiation, Nuclear Instruments and Methods in Physics Research B 296 (2013) 32-40
S. Azimi, Z. Y. Dang, J. Song, M. B. H. Breese, E. Vittone and J. Forneris, Defect enhanced funneling of diffusion current in silicon, Applied Physics Letters 102, 042102 (2013)
H. D. Liang, V. S. Kumar, J. F. Wu, and M. B. H. Breese, Ion beam irradiation induced fabrication of vertical coupling waveguides, Applied Physics Letters 102, 131112 (2013)
Zhiya Dang, Agnieszka Banas, Sara Azimi, Jiao Song, Mark Breese, Yong Yao, Shuvan Prashant Turaga, Gonzalo Recio-Sanchez, Andrew Bettiol and Jeroen Van Kan, Silicon and porous silicon mid-infrared photonic crystals, Applied Physics A 112 (2013) 517-523
S. Azimi, J. Song, Z. Y. Dang, and M. B. H. Breese, A thousand-fold enhancement of photoluminescence in porous silicon using ion irradiation, J. Appl. Phys. 114, 053517 (2013)

2012

S Azimi, M B H Breese, Z Y Dang, Y Yan, Y S Ow and A A Bettiol, Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation, J. Micromech. Microeng. 22 (2012) 015015
J. Song, Z. Y. Dang, S. Azimi, M. B. H. Breese, J. Forneris and E. Vittone, On the formation of 50nm Diameter free-standing silicon wires produced by ion irradiation, ECS Journal of Solid State Science and Technology 1 (2012) 66-69
Zhiya Dang, Mark BH Breese, Gonzalo Recio-Sánchez, Sara Azimi, Jiao Song, Haidong Liang, Agnieszka Banas, Vicente Torres-Costa and Raúl José Martín-Palma, Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method, Nanoscale Research Letters 2012, 7:416
S Azimi, J Song, Z Y Dang, H D Liang and M B H Breese, Three-dimensional silicon micromachining, J. Micromech. Microeng. 22 (2012) 113001
Gonzalo Recio-Sánchez, Zhiya Dang, Vicente Torres-Costa, Mark BH Breese and Raul-Jose Martín-Palma, Highly flexible method for the fabrication of photonic crystal slabs based on the selective formation of porous silicon, Nanoscale Research Letters 2012, 7:449

2011

Y. S. Ow, H. D. Liang, S. Azimi, and M. B. H. Breese, Modification of Porous Silicon Formation by Varying the End of Range of Ion Irradiation, Electrochemical and Solid-State Letters, 14 (5) D45-D47 (2011)
E.J. Teo, A.A. Bettiol, B.Q. Xiong, Fabrication of smooth silicon optical devices using proton beam writing, Nuclear Instruments & Methods in Physics Research B 269 (2011) 2448-2451

2010

E. J. Teo, A. A. Bettiol, B. Xiong, M. B. H. Breese and Prashant T Shuvan, An all-silicon, single-mode Bragg cladding rib waveguide, Optics Express, 18 (2010) 8816-8823
M. B. H. Breese, S. Azimi, Y. S. Ow, D. Mangaiyarkarasi, T. K. Chan, S. Jiao, Z. Y. Dang, and D. J. Blackwood, Electrochemical Anodization of Silicon-on-Insulator Wafers Using an AC, Electrochemical and Solid-State Letters, 13 8 H271-H273 2010
Y. S. Ow, S. Azimi, M. B. H. Breese, E. J. Teo, and D. Mangaiyarkarasi, Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces, J. Vac. Sci. Technol. B 28 (2010) 500
Y.S. Ow, M.B.H. Breese, Y.R. Leng, S. Azimi, E.J. Teo, X.W. Sun, Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon, Nuclear Instruments and Methods in Physics Research B 268 (2010) 1416-1421
Ow, Yueh Sheng; Breese, Mark B H; Azimi, Sara, Fabrication of concave silicon micro-mirrors, Optics Express, Vol. 18 Issue 14, pp.14511-14518 (2010)
Azimi, Sara ;Ow, Yueh Sheng; Breese, Mark B H;, On the Dependence of the Surface Roughness of Electrochemically Anodized Silicon on Ion Irradiation Fluence, Electrochemical and Solid-State Letters, 13 (11) H382-H384 (2010)

2009

Peng Yuan Yang, Stevan Stankovic, Jasna Crnjanski, Ee Jin Teo, David Thomson, Andrew A. Bettiol, Mark B. H. Breese, William Headley, Cristina Giusca, Graham T. Reed and Goran Z. Mashanovich, Silicon photonic waveguides for mid- and long-wave infrared region, Journal of Materials Science: Materials in Electronics 20 (2009) S159-163
E. J. Teo, A. A. Bettiol, B. Xiong, M. B. H. Breese, P. Yang, G. Z. Mashanovich, and G. T. Reed, Low loss silicon-on-oxidised porous silicon strip waveguides fabricated by focused proton beam irradiation, Optics Letters 34 (2009) 659
Y.S. Ow, M.B.H. Breese, A.A. Bettiol, Proton beam writing for producing holographic images, Nuclear Instruments & Methods in Physics Research B 267 (2009) 2289-2291
D. Luo,X. W. Sun, Y. J. Liu,H. T. Dai, O. Y. Sheng, M. B. H. Breese, and Z. Raszewski, Electrically switchable computer-generated hologram using a liquid crystal cell with a proton beam patterned polymethylmethacrylate substrate, Applied Optics 48 (2009) 3766
T.L. Sudesh L. Wijesinghe, Shi Qiang Li, Mark B.H. Breese, Daniel J. Blackwood, High resolution TEM and triple-axis XRD investigation into porous silicon, Electrochimica Acta 54 (2009) 3671-3676
YE. J. Teo, B. Q. Xiong, Y. S. Ow, M. B. H. Breese and A. A. Bettiol, Effects of oxide formation around core circumference of silicon-on-oxidized-porous-silicon strip waveguide, Optics Letters 34 (2009) 3142-3144

2008

D. Mangaiyarkarasi, Mark B. H. Breese and Ow Yueh Sheng, Fabrication of three dimensional porous silicon distributed bragg reflectors, Applied Physics Letters 93 (2008) 221905
D. Mangaiyarkarasi, Ow Yueh Sheng, Mark B. H. Breese, Vincent L. S. Fuh, and Eric Tang Xioasong, Fabrication of large-area patterned porous silicon distributed Bragg reflectors, Optics Express 16 (2008) 12757
Ee Jin Teo, Andrew A. Bettiol, Mark B. H. Breese, Pengyuan Yang, Goran Z. Mashanovich, William R. Headley, Graham T. Reed, Daniel J. Blackwood, Three-dimensional control of optical waveguide fabrication in silicon, Optics Express 16 (2008) 573-578
G. Z. Mashanovich, M. Milosevic, P. Matavulj, S. Stankovic, B. Timotijevic, P. Y. Yang, E. J. Teo, M. B. H. Breese, A. A. Bettiol and G T Reed, Silicon photonic waveguides for different wavelength regions, Semiconductor Science and Technology 23 (2008) 064002
E. J. Teo, A. A. Bettiol, M. B. H Breese, P. Y. Yang, G. Z. Mashanovich, W. R. Headley, G. T. Reed and D. J. Blackwood, An all-silicon channel waveguide fabricated using direct proton beam writing, Proceedings of SPIE Vol. 6898, 68980Q, (2008)
G. Z. Mashanovich, S. Stankovic, P. Y. Yang, E. J. Teo, F. Dell’Olio, V. M. N. Passaro, A. A. Bettiol, M. B. H. Breese, G. T. Reed, Silicon waveguides for the mid-infrared wavelength region, Proceedings of SPIE Vol. 6898, 68980T, (2008)
T.L. Sudesh, L. Wijesinghe, E.J. Teo, D.J. Blackwood, Potentiostatic formation of porous silicon in dilute HF: Evidence that nanocrystal size is not restricted by quantum confinement, Electrochimica Acta 53 (2008) 4381-4386

2007

E.J. Teo, M.B.H. Breese, A.A. Bettiol, F.J.T. Champeaux, T.L.S.L. Wijesinghe and D.J. Blackwood, Tunable colour emission from patterned porous silicon using ion beam writing, Nuclear Instruments and Methods in Physics Research B 260 (2007) 378-383
DD. Mangaiyarkarasi, M.B.H. Breese, O.Y. Sheng and D.J. Blackwood, Porous silicon microcavities fabricated using ion irradiation, Nuclear Instruments and Methods in Physics Research B 260 (2007) 445-449
M.B.H. Breese and D. Mangaiyarkarasi, Porous silicon Bragg reflectors with submicrometer lateral dimensions, Optics Express 15 (2007) 5537
Pengyuan Yang, Goran Mashanovic, Immaculada Gomez-Morilla, William Headley Graham Reed , Ee Jin Teo, Daniel Blackwood , Mark Breese, Andrew Bettiol, Free Standing Waveguides in Silicon, Applied Physics Letters 90 (2007) 241109
G.T. Reed, P.Y. Yang, W.R. Headley, P.M. Waugh, G.Z. Mashanovich, D. Thomson, R.M. Gwilliam, E.J. Teo, D.J. Blackwood, M.B.H. Breese and A.A Bettiol, Novel fabrication techniques for silicon photonics, Proceedings of SPIE 6477 (2007) 64770E
W. R. Headley; G. T. Reed; G. Z. Mashanovich; B. Timotijevic; F. Y. Gardes; D. Thomson; P. Yang; Ee Jin Teo; D. J. Blackwood; M. B. H. Breese; A. A. Bettiol; P. Waugh, Future prospects for silicon photonics Proceedings of SPIE 6593 (2007) 65931I

2006

E.J. Teo, M.B.H. Breese, A.A. Bettiol, D. Mangaiyarkarasi, F. Champeauz, F. Watt and D. Blackwood, Multicolour Photoluminescence from Porous Silicon using Focused High-energy Helium Ions, Advanced Materials 18 (2006) 51-55
D.Mangaiyarkarasi, Mark Breese, Ow Yueh Sheng, Kambiz Ansari, C.Vijila, and D.Blackwood, Porous silicon based Bragg reflectors and Fabry-Perot interference filters for photonic applications, Proc. SPIE 6125, 61250X (2006)
M.B.H. Breese, F.J.T. Champeaux, E.J. Teo, A.A.Bettiol and D. Blackwood, Hole transport through proton-irradiated p-type silicon wafers during electrochemical anodisation, Physical Review B 73 (2006) 035428
E. J. Teo, M. B. H. Breese, A. A. Bettiol, F. Champeaux and D. Blackwood, Patterning light emitting porous silicon using helium beam irradiation, Proceedings of SPIE 6183 (2006) 618312
E.J. Teo, D. Mangaiyarkarasi, M.B.H. Breese, A.A. Bettiol, F. Champeaux, F. Watt and D. Blackwood, Fabrication of Patterned Porous Silicon using high-energy ion irradiation, Journal of Porous Materials 13 (2006) 259-261
D. Mangaiyarkarasi, M. B. H. Breese, Y. S. Ow and C. Vijila, Controlled blueshift of the resonant wavelength in porous silicon microcavities using ion irradiation, Applied Physics Letters 89 (2006) 021910
M. B. H. Breese, D. Mangaiyarkarasi, E. J. Teo, A. A. Bettiol, and D. Blackwood, Micro-patterned porous silicon using proton beam writing, AIP Conf. Proc. 866 (2006) 269

2005

M.B.H. Breese, E.J. Teo, D. Mangaiyarkarasi, F. Champeaux, A.A. Bettiol, D. Blackwood, Proton beam writing of microstructures in silicon, Nuclear Instruments and Methods in Physics Research B 231 (2005) 357-363
D. Mangaiyarkarasi, E. J. Teo, M. B. H. Breese, A. A. Bettiol, and D. J. Blackwood, Controlled Shift in Emission Wavelength from Patterned Porous Silicon Using Focused Ion Beam Irradiation, Journal of The Electrochemical Society, 152 (2005) D173-D176

2004

E.J. Teo, D. Mangaiyarkarasi, M.B.H. Breese, A.A. Bettiol, D.J. Blackwood, Controlled intensity emission from patterned porous silicon using focused proton beam irradiation, Applied Physics Letters 85 (2004) 4370-4372
E. J. Teo, M. B. H Breese, E. P. Tavernier, A. A. Bettiol, F. Watt, M. H. Liu and D.J. Blackwood, Three-dimensional microfabrication in bulk silicon using high-energy protons, Applied Physics Letters 84 (2004) 3202-3204
E.J. Teo, E.P. Tavernier, M.B.H. Breese, A.A. Bettiol, F. Watt, M.H. Liu, D.J. Blackwood, Three-dimensional micromachining of silicon using a nuclear microprobe, Nuclear Instruments & Methods in Physics Research B- 222 (2004) 513-517
E.J. Teo, M.H. Liu, M.B.H. Breese, E.P. Tavernier, A.A. Bettiol, D.J. Blackwood and F.Watt, Fabrication of silicon microstructures using a high energy ion beam, Proceedings of SPIE Vol. 5347 (2004) 264-270
Blackwood, D.J., Teo, E.J.; Breese, M.B.H.; Bettiol, A.A. Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching, Electrochemical Society Proceedings, v 9, Microfabricated Systems and MEMS VII – Proceedings of the International Symposium, 2004, p 108-116