Publications -Facility

2017

Design considerations for a compact proton beam writing system aiming for fast sub-10nm direct write lithography, Xinxin Xu, Nannan Liu, P. Santhana Ramana, Sarfraz Qureshi, Rudy Pang, Anjam Khursheed, Jeroen A. van Kan, Nuclear Instruments & Methods in Physics Research Section B 404 (2017) 243-249
Fabrication and development of high brightness nano-aperture ion source, X. Xu, R. Pang, P.S. Raman, R. Mariappan, A. Khursheed, JA van Kan, Microelectronic engineering 174 (2017) 20-23
Performance test of high brightness nano-aperture ion source, X. Xu, P. S. Raman, R. Pang, N. Liu, A. Khursheed and J. A. van Kan, Nuclear Instruments & Methods in Physics Research Section B 404 (2017) 52-57
Quadrupole lens alignment with improved STIM and secondary electron imaging for Proton Beam Writing, Sarfraz Qureshi, P. Santhana Ramana, Alrik Stegmaierc, Jeroen A. van Kan, Nuclear Instruments & Methods in Physics Research Section B404 (2017) 74-80

Brightness measurement of an electron impact gas ion source for proton beam writing applications, N. Liu, X. Xu, R. Pang, P. S. Raman, A. Khursheed and J. A. van Kan, Review of Scientific Instruments 87 (2016) 02A903-1

Automatic beam focusing in the 2nd generation PBW line at sub-10 nm line resolution, Y Yao, JA van Kan, Nuclear Instruments & Methods in Physics Research Section B348 (2015) 203-208
Development of ion sources: towards high brightness for proton beam writing applications, N. Liu; P. Santhana Raman, X. Xu; H. M. Tan; A. Khursheed, J. A. van Kan, Nuclear Instruments & Methods in Physics Research Section B348 (2015) 23-28

T.K. Chan, J. Song, T.F. Choo, M.B.H. Breese, Sub – 100 keV ion beam generation with a Van De Graaff accelerator using an external DC voltage supply, Nuclear Instruments & Methods in Physics Research B 269 (2011) 2699-2702

C. Udalagama, A.A. Bettiol, and F. Watt, Imaging using Pulses: A simple & fast (> 100 kHz) solution, Journal of Microscopy 238 (2010) 185-188

A.A. Bettiol, C. Udalagama, F. Watt, A new data acquisition and imaging system for nuclear microscopy based on a Field Programmable Gate Array card, Nuclear Instruments & Methods in Physics Research B 267 (2009) 2069-2072

TT. Osipowicz, H.L. Seng, T.K. Chan and B. Ho, The CIBA high resolution RBS facility, Nuclear Instruments and Methods in Physics Research, Section B 249 (2006) 915-917

C.N.B. Udalagama, A.A. Bettiol, J.A. van Kan, E.J. Teo, M.B.H. Breese, T. Osipowicz, F. Watt, An automatic beam focusing system for MeV protons, Nuclear Instruments and Methods in Physics Research B 231 (2005) 389-393

E. J. Teo, M.B.H. Breese, A. A. Bettiol, F. Watt L. C. Alves, High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications, Journal of Vacuum Science and Technology B 22 (2004) 560-564
Simon, A.; Jeynes, C.; Webb, R.P.; Finnis, R.; Tabatabaian, Z.; Sellin, P.J.; Breese, M.B.H.; Fellows, D.F.; Van den Broek, R.; Gwilliam, R.M. , The new Surrey ion beam analysis facility,Nuclear Instruments and Methods in Physics Research B 219-220 (2004) 405-409

Imaseki, Hitoshi; Yukawa, Masae; Watt, Frank; Ishikawa, Takahiro; Iso, Hiroyuki; Hamano, Tsuyoshi; Matsumoto, Kenichi; Yasuda, Nakahiro.The scanning microbeam PIXE analysis facility at NIRS, Nuclear Instruments & Methods in Physics Research B 210 (2003) 42-47
Nebiki, T.; Yamamoto, T.; Narusawa, T.; Breese, M. B. H.; Teo, E. J.; Watt, F.. Focusing of MeV ion beams by means of tapered glass capillary optics, Journal of Vacuum Science & Technology, A 21 (2003) 1671-1674
Watt, F.; Van Kan, J. A.; Rajta, I.; Bettiol, A. A.; Choo, T. F.; Breese, M. B. H.; Osipowicz, T., The National University of Singapore high energy ion nano-probe facility: performance tests,Nuclear Instruments & Methods in Physics Research, B: (2003), 210 14-20

Watt, F.; Osipowicz, T.; Choo, T.F.; Orlic, I.; Tang, S.M., Nuclear microprobe analysis and imaging: current state of the art performances, Nuclear Instruments & Methods in Physics Research, B 136-138 (1998) 313